Title:
MICROFOCUS FIELD EMISSION ELECTRON SOURCE BASED ON CARBON NANOTUBE, AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/233093
Kind Code:
A1
Abstract:
A microfocus field emission electron source based on a carbon nanotube, and a preparation method therefor. The method comprises the following steps: (1) applying a metal platinum layer onto the surface of a nickel substrate; (2) under the protection of a protective gas, performing, by using a pulse laser and in a negative defocusing mode, point ablation on the surface of the nickel substrate that is plated with metal platinum, wherein the focus of the laser is inside the nickel substrate during negative defocusing ablation, so that internal nickel metal is melted, flows to the surface of the nickel substrate under a pushing force of nickel metal vapor, and forms a spherical shell after being cooled; and (3) directly growing, by using a chemical vapor phase deposition method, a carbon nanotube cathode film on the spherical shell, which is formed by means of laser ablation, of the nickel substrate. The microfocus electron source has the advantages of a low turn-on electric field (<1 V/μm), a high current density (~ 1 A/cm2), good high-pressure emission operation stability, etc.
Inventors:
DONG CHANGKUN (CN)
ZHU WEI (CN)
QIAN WEIJIN (CN)
HUANG WEIJUN (CN)
ZHU WEI (CN)
QIAN WEIJIN (CN)
HUANG WEIJUN (CN)
Application Number:
PCT/CN2021/108337
Publication Date:
November 10, 2022
Filing Date:
July 26, 2021
Export Citation:
Assignee:
UNIV WENZHOU (CN)
International Classes:
H01J37/073
Foreign References:
| CN101206979A | 2008-06-25 | |||
| CN101209833A | 2008-07-02 | |||
| CN112233956A | 2021-01-15 | |||
| US20020160111A1 | 2002-10-31 | |||
| US20050077811A1 | 2005-04-14 |
Attorney, Agent or Firm:
WENZHOU MINGCHUANG INTELLECTUAL PROPERTY AGENCY CO., LTD (CN)
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