Title:
MICROMACHINED OPTOMECHANICAL SWITCHING DEVICES
Document Type and Number:
WIPO Patent Application WO2000075710
Kind Code:
A3
Abstract:
Various configurations of micromachined optomechanical switching cells are disclosed herein. In accordance with the invention, an optomechanical switching cell is provided which includes an actuator positioned on a substrate and a mirror coupled to the actuator. The switching cell also includes an electrode disposed upon the substrate under the actuator. An insulator may also be interposed between the substrate and the electrode. In another aspect of the present invention the switching cell includes a latch having a first end region connected to the substrate and a second end region engaged by the mirror.
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Inventors:
FAN LI (US)
HUSAIN ANIS (US)
HUSAIN ANIS (US)
Application Number:
PCT/US2000/014843
Publication Date:
May 10, 2002
Filing Date:
May 26, 2000
Export Citation:
Assignee:
OPTICAL MICRO MACHINES INC (US)
FAN LI (US)
HUSAIN ANIS (US)
FAN LI (US)
HUSAIN ANIS (US)
International Classes:
G02B6/35; G02B26/08; H04Q11/00; (IPC1-7): G02B26/00; G02B26/02; G02B26/08
Domestic Patent References:
| WO1998009289A1 | 1998-03-05 |
Foreign References:
| DE19644918A1 | 1998-04-30 | |||
| US4580873A | 1986-04-08 | |||
| EP0550017A2 | 1993-07-07 |
Other References:
COLLINS D R ET AL: "DEFORMABLE MIRROR DEVICE SPATIAL LIGHT MODULATORS AND THEIR APPLICABILITY TO OPTICAL NEURAL NETWORKS", APPLIED OPTICS,US,OPTICAL SOCIETY OF AMERICA,WASHINGTON, vol. 28, no. 22, 15 November 1989 (1989-11-15), pages 4900 - 4907, XP000071472, ISSN: 0003-6935
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