Title:
MIRROR
Document Type and Number:
WIPO Patent Application WO/2014/040866
Kind Code:
A3
Abstract:
Mirror having a fragmented total surface area, wherein the fragmentation forms an aperiodic arrangement.
Inventors:
SÄNGER INGO (DE)
RUOFF JOHANNES (DE)
ENDRES MARTIN (DE)
EISENMANN THOMAS (DE)
RUOFF JOHANNES (DE)
ENDRES MARTIN (DE)
EISENMANN THOMAS (DE)
Application Number:
PCT/EP2013/067965
Publication Date:
May 08, 2014
Filing Date:
August 30, 2013
Export Citation:
Assignee:
ZEISS CARL SMT GMBH (DE)
International Classes:
G03F7/20
Domestic Patent References:
| WO2011134692A1 | 2011-11-03 |
Foreign References:
| US3514781A | 1970-05-26 | |||
| US20030058189A1 | 2003-03-27 | |||
| US20070024972A1 | 2007-02-01 | |||
| US20030026001A1 | 2003-02-06 | |||
| US20050274912A1 | 2005-12-15 | |||
| US20050225739A1 | 2005-10-13 | |||
| DE102010041623A1 | 2012-03-29 |
Attorney, Agent or Firm:
RAU, SCHNECK & HÜBNER (Nürnberg, DE)
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