Title:
MOUNTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/098448
Kind Code:
A1
Abstract:
Provided is a mounting device that has: a main frame (11) to which a mounting stage is attached; gantry frames (20) supported above the main frame (11); mounting heads (70) each supported by the corresponding gantry frame (20) in a freely movable manner in the Y direction; a sub frame (80) disposed so as to be apart from the main frame (11); and a Y-direction load receiving member (54) attached to the sub frame (80) so as to be freely movable in the X direction and to have constrained movement in the Y direction, wherein an X-direction fixation member (30) is attached to the sub frame (80), and one end of a Y-direction fixation member attached to the gantry frame (20) is connected to the Y-direction load receiving member (54) via a connection member (53). Accordingly, vibration of the main frame caused when plurality of mounting heads are moved in the X and Y directions is suppressed.
Inventors:
SEYAMA KOHEI (JP)
Application Number:
PCT/JP2015/080006
Publication Date:
June 23, 2016
Filing Date:
October 23, 2015
Export Citation:
Assignee:
SHINKAWA KK (JP)
International Classes:
H05K13/04; H01L21/60; H01L21/677
Foreign References:
| JP2010120003A | 2010-06-03 | |||
| JP2014187157A | 2014-10-02 | |||
| JP2013066833A | 2013-04-18 |
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