Title:
MULTI-ELECTRON BEAM IMAGE ACQUISITION DEVICE AND MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/239646
Kind Code:
A1
Abstract:
A multi-electron beam image acquisition device according to an aspect of the present invention is characterized by comprising: a stage on which a substrate is mounted; an illumination optical system which uses a multi-primary electron beam to illuminate the substrate with the multi-primary electron beam; two or more tiers of a plurality of multipole lenses having a plurality of electrodes with four or more poles and a plurality of magnetic poles with four or more poles, and disposed at positions at which the trajectory of the multi-primary electron beam and the trajectory of a multi-secondary electron beam emitted due to the irradiation of the substrate with the multi-primary electron beam are the same; and a multi-detector which detects the multi-secondary electron beam separated from the trajectory of the multi-primary electron beam, one of the plurality of multipole lenses separating the multi-secondary electron beam from the trajectory of the multi-primary electron beam.
Inventors:
INOUE KAZUHIKO (JP)
ANDO ATSUSHI (JP)
OGASAWARA MUNEHIRO (JP)
ANDO ATSUSHI (JP)
OGASAWARA MUNEHIRO (JP)
Application Number:
PCT/JP2022/018962
Publication Date:
November 17, 2022
Filing Date:
April 26, 2022
Export Citation:
Assignee:
NUFLARE TECHNOLOGY INC (JP)
International Classes:
H01J37/12; H01J37/141; H01J37/145; H01J37/244
Domestic Patent References:
| WO2020193102A1 | 2020-10-01 |
Foreign References:
| JP2020528197A | 2020-09-17 | |||
| JP2003257355A | 2003-09-12 |
Attorney, Agent or Firm:
IKEGAMI, Tetsuma et al. (JP)
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