OPTICAL ASSEMBLY

WIPO Patent Application WO2006079537

A3

Optical assembly supported in an arrangement, especially in an objective (1, 8) or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens (34, 35), a mirror, or an aperture (9), wherein the at least one element is influenceable by at least one manipulator and wherein (i) the at least one manipulator (10, 22, 25) is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator (10, 22, 25) and the element to be influenced by the manipulator (10, 22, 25) in the interior of the arrangement, (ii) the manipulator comprises a mechanism for adjusting precisely or for micro-adjusting of the optical element, or (iii) the manipulator comprises a first and a second means wherein the first means generates a repelling force and/or a repelling torque and the second means (5, 6, 11, 15, 19) counteracts the repelling force and/or the repelling torque generated by the first means and at least partially compensates for the force and/or the torque generated by the first means.

BIEG HERMANN (DE)
AUBELE KARL-EUGEN (DE)
KWAN YIM-BUN PATRICK (DE)
XALTER STEFAN (DE)

PCT/EP2006/000684

September 21, 2006

January 26, 2006

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ZEISS CARL SMT AG (DE)
BIEG HERMANN (DE)
AUBELE KARL-EUGEN (DE)
KWAN YIM-BUN PATRICK (DE)
XALTER STEFAN (DE)

G02B7/00; G02B7/02; G02B7/182

US20040257683A1	2004-12-23
EP1385034A1	2004-01-28
US5237362A	1993-08-17
EP0392511A2	1990-10-17
US20020150324A1	2002-10-17
US20040189969A1	2004-09-30

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