OPTICAL CIRCUIT MEASUREMENT SYSTEM AND MEASUREMENT METHOD

WIPO Patent Application WO/2023/021697

A1

The present disclosure provides an optical waveguide measurement system and a measurement method which have high throughput, and suppress a positional displacement or an increase in the data capacity of a captured image by applying processing trained by machine learning to a low magnification image of a wide imaging field of view. A measurement system according to the present disclosure comprises: an imaging unit which images an object to be imaged; a data set generation unit which implements pattern matching processing and trimming processing for a plurality of images having different magnifications, and generates a training image data set; a machine-learning unit which includes a neural network, is trained, on the basis of the training image data set, to implement ultra-resolution processing in the neural network, and generates a super-resolution-processed image on the basis of the image and a trained network configuration; and a measurement unit which measures, on the basis of the super-resolution-processed image, at least a portion of the object to be measured. In addition, the present disclosure provides an optical waveguide measurement method comprising training processing and execution processing.

OTA MASASHI (JP)
YAMAGUCHI KEITA (JP)
SUZUKI KENYA (JP)

PCT/JP2021/030623

February 23, 2023

August 20, 2021

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NIPPON TELEGRAPH & TELEPHONE (JP)

G01B11/02

WO2009044785A1

2009-04-09

JP2015025758A	2015-02-05
JP2020163100A	2020-10-08
JP2003232948A	2003-08-22

TANI & ABE, P.C. (JP)

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