OPTICAL DEVICE OF WAVEGUIDE TYPE AND ITS PRODUCTION METHOD

WIPO Patent Application WO/2005/022223

A1

An optical device of waveguide type comprises a mesa-shaped multimode waveguide and a burying layer for burying a mesa side wall of the multimode waveguide. The mesa-shaped multimode waveguide is composed of a core layer and a guide layer formed in multilayer in order of mention. The core and guide layers are made of semiconductor of lead marcasite crystal structure. Abnormal growth of the burying layer on the mesa side face is suppressed, and consequently the multimode waveguide has a small light loss and a high efficiency. For the suppression, the multimode waveguide comprises a side face composed of (1) a face equivalent to the (100)-face or (2) a face having an inclination angle of the direction in which the core and guide are formed in multilayer with respect to the equivalent face equivalent to the (100)-face and/or an off angle within 7° with respect to the direction parallel to the core and guide layers.

SHIBA KAZUHIRO (JP)
NANIWAE KOUICHI (JP)
SUDO SHINYA (JP)
KUDO KOJI (JP)

PCT/JP2004/012468

March 10, 2005

August 30, 2004

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NEC CORP (JP)
SHIBA KAZUHIRO (JP)
NANIWAE KOUICHI (JP)
SUDO SHINYA (JP)
KUDO KOJI (JP)

G02B6/122; G02B6/125; G02B6/13; G02B6/28; (IPC1-7): G02B6/12; H01S5/50; H01L31/02

JP2000208862A	2000-07-28
JP2002164608A	2002-06-07
JP2001196695A	2001-07-19
JPH1164655A	1999-03-05
EP0898348A1	1999-02-24
EP0898346A1	1999-02-24
JP2000323781A	2000-11-24
JP2003078209A	2003-03-14
JPH1164656A	1999-03-05
JPH0897509A	1996-04-12

Hayami, Shinji (2-17-16 Ebisu-Nish, Shibuya-ku Tokyo, JP)

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