Title:
OSCILLATING ELEMENT, OSCILLATION ELEMENT MANUFACTURING METHOD, OPTICAL SCANNING DEVICE, IMAGE FORMING DEVICE AND IMAGE DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/114065
Kind Code:
A1
Abstract:
Provided is an oscillating element having a configuration by which adhesiveness
with an actuator is improved. An oscillating element (300) is provided with a
driving layer (30), which is arranged on a substrate (31) supporting an oscillating
section (19a) so that the section can be oscillated, and oscillates the oscillating
section (19a). The driving layer (30) is provided with an adhesive layer (32)
adhered on the side of the substrate (31). The oscillating element has an intermediate
layer (33) between the substrate (31) and the driving layer (30). In the intermediate
layer (33), a material which can be bonded by permitting surface activation bonding
is used to face the substrate (31), a material, with which anchor effects can be
easily obtained with a rougher surface than the surface on the side of the substrate
(31), is used to face the adhesive layer (32).
Inventors:
ASAI NOBUAKI (JP)
Application Number:
PCT/JP2007/055845
Publication Date:
October 11, 2007
Filing Date:
March 22, 2007
Export Citation:
Assignee:
BROTHER IND LTD (JP)
ASAI NOBUAKI (JP)
ASAI NOBUAKI (JP)
International Classes:
H01L41/09; B81B3/00; B81C1/00; G02B26/08; G02B26/10; G02B27/02; H04N1/036
Foreign References:
| JP2004347769A | 2004-12-09 | |||
| JP2003008094A | 2003-01-10 |
Attorney, Agent or Firm:
MATSUO, Kenichiro (Shinkumi Akasaka Bldg.10-17, Akasaka_1-chome,Chuo-ku, Fukuoka-sh, Fukuoka 42, JP)
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