Title:
PERMANENT PATTERNING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/000885
Kind Code:
A1
Abstract:
A permanent patterning method capable of forming a high resolution permanent pattern
efficiently by averaging the impact of variation in amount of exposure due to
distortion of pattern thereby suppressing distortion of an image being formed
on a photosensitive layer. In the permanent patterning method, after a photosensitive
layer is formed on the surface of a substrate by using a photosensitive composition,
a writing part being used for N-fold exposure (N is a natural number of 2 or above)
is specified for the photosensitive layer by a use writing part specifying section
by using an exposure head comprising a light irradiating means and an optical
modulation means and arranged such that the array direction of writing portions
makes a predetermined set inclination angle θ with respect to the scanning
direction, a writing portion control means controls the writing portions such
that only a specified writing portion participates in exposure, and then the
photosensitive layer is exposed and developed by moving the exposure head relatively
to the layer in the scanning direction.
Inventors:
TAKASHIMA MASANOBU (JP)
SUMI KATSUTO (JP)
KOWADA KAZUTERU (JP)
SUZUKI ISSEI (JP)
UEMURA TAKAYUKI (JP)
SUMI KATSUTO (JP)
KOWADA KAZUTERU (JP)
SUZUKI ISSEI (JP)
UEMURA TAKAYUKI (JP)
Application Number:
PCT/JP2006/311503
Publication Date:
January 04, 2007
Filing Date:
June 08, 2006
Export Citation:
Assignee:
FUJI PHOTO FILM CO LTD (JP)
TAKASHIMA MASANOBU (JP)
SUMI KATSUTO (JP)
KOWADA KAZUTERU (JP)
SUZUKI ISSEI (JP)
UEMURA TAKAYUKI (JP)
TAKASHIMA MASANOBU (JP)
SUMI KATSUTO (JP)
KOWADA KAZUTERU (JP)
SUZUKI ISSEI (JP)
UEMURA TAKAYUKI (JP)
International Classes:
G03F7/20; G03F7/004; G03F7/09; G03F7/40; H01L21/027; H05K3/00
Foreign References:
| JP2004009595A | 2004-01-15 | |||
| JPH086246A | 1996-01-12 | |||
| JP2002303974A | 2002-10-18 | |||
| JP2001040174A | 2001-02-13 | |||
| JP2000159857A | 2000-06-13 | |||
| JPH07261388A | 1995-10-13 | |||
| JP2005022250A | 2005-01-27 | |||
| JP2004181723A | 2004-07-02 | |||
| JP2005003762A | 2005-01-06 | |||
| JP2003295326A | 2003-10-15 | |||
| JPH09152660A | 1997-06-10 | |||
| JP2006030966A | 2006-02-02 | |||
| JP2006030986A | 2006-02-02 | |||
| JP2004001244A | 2004-01-08 | |||
| JP2005055881A | 2005-03-03 | |||
| JP2004326076A | 2004-11-18 | |||
| JP2003332221A | 2003-11-21 | |||
| JP2005062847A | 2005-03-10 |
Attorney, Agent or Firm:
HIROTA, Koichi et al. (NAGARE & ASSOCIATES 4th Floor, Shinjuku TR Bldg., 2-2-13, Yoyog, Shibuya-ku Tokyo 53, JP)
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