Title:
PLANETARY DISC STRUCTURE AND EVAPORATIVE DEPOSITION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/124251
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application are a planetary disc structure and an evaporative deposition apparatus. The planetary disc structure comprises: a rotary disc and at least one substrate disc, a first rotational connection piece being arranged between each substrate disc and the rotary disc and being used for rotationally connecting the substrate disc and the rotary disc such that the included angle between the central axes of the substrate disc and the rotary disc is variable. In the embodiments of the present application, the angle of the substrate disc of the planetary disc structure is variable, such that during coating of a large-size substrate, the thickness uniformity of a metal film on the substrate can be effectively improved, and the yield of substrate coating is improved, thereby reducing production costs.
Inventors:
TAN ZITING (CN)
QI YI (CN)
YI HONGSHENG (CN)
JIAO WEI (CN)
QI YI (CN)
YI HONGSHENG (CN)
JIAO WEI (CN)
Application Number:
PCT/CN2022/118932
Publication Date:
July 06, 2023
Filing Date:
September 15, 2022
Export Citation:
Assignee:
HUAWEI DIGITAL POWER TECH CO LTD (CN)
International Classes:
C23C14/24; C23C14/50
Foreign References:
| CN217230906U | 2022-08-19 | |||
| JP2006330656A | 2006-12-07 | |||
| JPH09143717A | 1997-06-03 | |||
| CN101597747A | 2009-12-09 | |||
| KR20200007395A | 2020-01-22 |
Attorney, Agent or Firm:
LEADER PATENT & TRADEMARK FIRM (CN)
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