Title:
POLYCRYSTALLINE SIC MOLDED ARTICLE, AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2024/134941
Kind Code:
A1
Abstract:
Provided is a polycrystalline SiC molded article which has an approximately sheet-like form and has a first main surface and a second main surface that is parallel with the first main surface. The polycrystalline SiC molded article includes: a region R200, a region R311, a region R111 and a region R220 which are arranged along a normal direction relative to the first main surface and in which (200) face, (311) face, (111) face and (220) face are oriented respectively; and a region R200, a region R311, a region R111 and a region R220 which are arranged along a normal direction relative to the second main surface and in which (200) face, (311) face, (111) face and (220) face are oriented respectively. The area fraction of a region RXYZ = (the area of the region RXYZ)/((the area of the region R111) + (the area of the region R200) + (the area of the region R220) + (the area of the region R311)), in which the region RXYZ is any one of the region R111, the region R200, the region R220 and the region R311. At least one of a requirement that the difference between the area fraction of the region R200 in the first main surface and the area fraction of the region R200 in the second main surface is 10.0% or less and a requirement that the difference between the area fraction of the region R311 in the first main surface and the area fraction of the region R311 in the second main surface is 10.0% or less is satisfied. The polycrystalline SiC molded article has excellent flatness. Also provided is a method for producing the polycrystalline SiC molded article.
Inventors:
SUGIHARA Takaomi (LTD. 2-3 Kita-Aoyama 1-chome, Minato-k, Tokyo 36, JP)
Application Number:
PCT/JP2023/024819
Publication Date:
June 27, 2024
Filing Date:
July 04, 2023
Export Citation:
Assignee:
TOKAI CARBON CO., LTD. (Minato-ku Tokyo, 36, JP)
International Classes:
C23C16/42; C30B29/36; H01L21/205
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