Title:
PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/139919
Kind Code:
A1
Abstract:
Provided is a pressure sensor that makes it possible to reliably fill a housing that is provided with an adjustment member with an insulating liquid. A base 11 includes a first channel 11i that is filled with a first fluid F1 and a first recess 11b that communicates with the first channel 11i. A first diaphragm 17 seals the first recess 11b. A sensor unit 20 is provided in the first recess 11b. An adjustment member 19 is arranged around the sensor unit 20 in the first recess 11b and includes a hole 19b that communicates with the first channel 11i and introduces the first fluid F1 in the first channel 11i into the first recess. The first diaphragm 17 includes a plurality of concentric grooves 17a, and the hole 19b is opposite one of the plurality of grooves.
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Inventors:
FUKASAWA MASAKI (JP)
ISHIKAWA YUSUKE (JP)
ISHIKAWA YUSUKE (JP)
Application Number:
PCT/JP2022/043328
Publication Date:
July 27, 2023
Filing Date:
November 24, 2022
Export Citation:
Assignee:
NIDEC COPAL ELECTRONICS CORP (JP)
International Classes:
G01L19/06
Foreign References:
| JP2007017223A | 2007-01-25 | |||
| JPH10122997A | 1998-05-15 | |||
| JPH0850070A | 1996-02-20 | |||
| FR2733832A1 | 1996-11-08 |
Attorney, Agent or Firm:
S & S INTERNATIONAL PPC (JP)
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