Title:
PROBE APPARATUS AND TESTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/036718
Kind Code:
A1
Abstract:
A probe apparatus, which transmits and receives signals to and from a target device, comprises: a contacting unit that contacts with a terminal of the target device to make an electrical connection with the target device; a non-contacting unit that transmits and receives signals to and from the target device without contacting with any terminal of the target device; and a holding unit that holds the contacting and non-contacting units in such a manner that the relative positions of the contacting and non-contacting units can be shifted in a connecting direction in which the non-contacting unit would be connected with the corresponding terminal of the target device.
Inventors:
KOMOTO YOSHIO (JP)
Application Number:
PCT/JP2009/004852
Publication Date:
March 31, 2011
Filing Date:
September 25, 2009
Export Citation:
Assignee:
ADVANTEST CORP (JP)
KOMOTO YOSHIO (JP)
KOMOTO YOSHIO (JP)
International Classes:
G01R31/302; G01R1/06; G01R1/067; G01R1/073
Foreign References:
| JP2001289898A | 2001-10-19 | |||
| US5012187A | 1991-04-30 |
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
Ryuka international patent business corporation (JP)
Ryuka international patent business corporation (JP)
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