PROBE MODULE AND TESTER - ADVANTEST CORP

Title:

PROBE MODULE AND TESTER

Document Type and Number:

WIPO Patent Application WO/2003/016930

Kind Code:

A1

Abstract:

A probe module being connected electrically with the terminal of a device under test and transmitting&sol receiving a signal to&sol from the device under test, comprising a first substrate, a probe pin provided on the first substrate to touch the terminal of the device under test, a first signal transmission pattern provided on the first substrate while having a gap not conducting an electric signal and being connected electrically with the probe pin, and a first switch means for shorting or opening the gap of the first signal transmission pattern.

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Inventors:

MAEDA YASUHIRO (JP)
TAKAYANAGI FUMIKAZU (JP)

Application Number:

PCT/JP2002/007410

Publication Date:

February 27, 2003

Filing Date:

July 23, 2002

Export Citation:

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Assignee:

ADVANTEST CORP (JP)
MAEDA YASUHIRO (JP)
TAKAYANAGI FUMIKAZU (JP)

International Classes:

G01R1/073; (IPC1-7): G01R31/28; G01R1/073; G01R1/06; H01L21/66

Foreign References:

JPH10197559A	1998-07-31
JPH0875758A	1996-03-22

Attorney, Agent or Firm:

Ryuka, Akihiro (24-12 Shinjuku 1-chom, Shinjuku-ku Tokyo, JP)

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