Title:
PROCESS FOR PRODUCING ORGANIC ELECTROLUMINESCENCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/032062
Kind Code:
A1
Abstract:
Defective level formation damages tending to occur in an organic material film
are suppressed in the forming of an electrode material on the organic material
film in accordance with reactive sputtering technique. A conductive material
protection film is superimposed on an organic material film in accordance with
nonreactive sputtering technique. Thereafter, from the surface of the protection
film, conversion of the organic material film to an oxide film is carried out in
accordance with plasma oxidation technique using oxygen radical ions generated
by a low-electron-temperature high-density plasma apparatus, thereby providing
an electrode. This conversion of the organic material film in the state of being
covered with the conductive protection film to the oxide film enables suppressing
of defective level formation damages tending to occur in the organic material
film.
Inventors:
OHMI TADAHIRO (JP)
WAKAMATSU HIDETOSHI (JP)
HOSHI SAKUTARO (JP)
WAKAMATSU HIDETOSHI (JP)
HOSHI SAKUTARO (JP)
Application Number:
PCT/JP2005/016902
Publication Date:
March 22, 2007
Filing Date:
September 14, 2005
Export Citation:
Assignee:
OHMI TADAHIRO (JP)
WAKAMATSU HIDETOSHI (JP)
HOSHI SAKUTARO (JP)
WAKAMATSU HIDETOSHI (JP)
HOSHI SAKUTARO (JP)
International Classes:
H05B33/10; H05B33/14; H05B33/26; H05B33/28
Foreign References:
| JP2004171951A | 2004-06-17 | |||
| JP2004139981A | 2004-05-13 | |||
| JP2004087321A | 2004-03-18 |
Attorney, Agent or Firm:
IKEDA, Noriyasu et al. (4-10 Nishishinbashi 1-chome, Minato-k, Tokyo 03, JP)
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