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Title:
PROCESSING APPARATUS AND COLLIMATOR
Document Type and Number:
WIPO Patent Application WO/2017/158979
Kind Code:
A1
Abstract:
The processing apparatus according to an embodiment is provided with a container, a workpiece-setting section, a collimator, and a magnetic field-generating section. The workpiece-setting section is provided inside the container and a workpiece on which particles are to be laminated can be placed thereon. The collimator is provided inside the container, has a first surface and a second surface on the side opposite the first surface, and is provided with through holes that pass through the first surface and the second surface. The magnetic field-generating section is provided inside the container and generates a magnetic field between the first surface and the second surface inside the through holes.

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Inventors:
TOKUDA YOSHINORI (JP)
NOJIRI YASUHIRO (JP)
KATO SHIGUMA (JP)
TERADA TAKAHIRO (JP)
TAKEUCHI MASAKATSU (JP)
AOYAMA YASUHIRO (JP)
Application Number:
PCT/JP2016/087823
Publication Date:
September 21, 2017
Filing Date:
December 19, 2016
Export Citation:
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Assignee:
TOSHIBA KK (JP)
International Classes:
C23C14/34; H01L21/203; H01L21/285
Foreign References:
JPH06136527A1994-05-17
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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