Title:
PRODUCTION CONTROL DEVICE AND PRODUCTION CONTROL PROGRAM
Document Type and Number:
WIPO Patent Application WO/2017/208357
Kind Code:
A1
Abstract:
According to the present invention, a model value evaluation unit (130) calculates a measurement average, which is an average of multiple measurement values obtained from multiple production devices, and calculates, as a mean difference, the difference between the measurement average and a model value. In the case when the mean difference is greater than an allowable maximum mean difference, the model value evaluation unit updates the model value. A parameter value evaluation unit (140) calculates, as a measurement difference, the difference between the measurement value and the model value. In the case when the measurement difference is greater than an allowable maximum measurement difference, the parameter value evaluation unit changes the value of a control parameter that controls the corresponding production device.
Inventors:
SHI XIAONAN (JP)
Application Number:
PCT/JP2016/066046
Publication Date:
December 07, 2017
Filing Date:
May 31, 2016
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G05B19/418; G05B13/04; G05B23/02; G06Q50/04; H01L21/02
Foreign References:
| JP2010087459A | 2010-04-15 | |||
| JP2000252179A | 2000-09-14 | |||
| JP5877908B2 | 2016-03-08 |
Attorney, Agent or Firm:
MIZOI, Shoji et al. (JP)
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