Title:
PROGRAM, INFORMATION PROCESSING METHOD, INFORMATION PROCESSING DEVICE, AND MODEL GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/120488
Kind Code:
A1
Abstract:
A program according to one embodiment of the present disclosure causes a computer to execute a process for: acquiring process data including at least two among the type and flow rate of gas supplied to the inside of a semiconductor manufacturing device, chamber internal pressure, and valve opening degree of an automatic pressure control device; inputting the process data to a training model trained to output an estimated pressure value of the inside of the semiconductor manufacturing device when the process data is inputted, and outputting the estimated pressure value; and determining whether a state is an abnormal state on the basis of the estimated pressure value.
Inventors:
HIRAMURA TATSUO (JP)
Application Number:
PCT/JP2022/046721
Publication Date:
June 29, 2023
Filing Date:
December 19, 2022
Export Citation:
Assignee:
SPP TECH CO LTD (JP)
International Classes:
H01L21/3065; C23C14/54; C23C16/52; G06N3/08; G06N20/00
Foreign References:
| JP2002346367A | 2002-12-03 | |||
| JP2021518674A | 2021-08-02 | |||
| JP2011517806A | 2011-06-16 | |||
| JP2006210728A | 2006-08-10 | |||
| JP2012199365A | 2012-10-18 | |||
| JP2018041217A | 2018-03-15 | |||
| JP2009253087A | 2009-10-29 | |||
| JPH059759A | 1993-01-19 |
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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