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Title:
REACTION CHAMBER
Document Type and Number:
WIPO Patent Application WO/2021/175089
Kind Code:
A1
Abstract:
Disclosed is a reaction chamber, comprising a cavity body, wherein the cavity body is connected to an upper cover by means of an insulating part, the cavity body and the upper cover form an inner cavity, and the upper cover is provided with a through hole in communication with the inner cavity; a gas intake mechanism comprises an insulating main body at least partially arranged in the through hole, a gas intake channel is arranged in the insulating main body, a flange component is arranged on one side, facing away from the inner cavity, of the insulating main body, and the flange component is grounded and used for communicating a gas intake end of the gas intake channel with a gas output end of a gas intake pipe used for conveying reaction gas; a gas output end of the gas intake channel is in communication with the inner cavity; and moreover, the gas intake channel comprises at least two channel sections which are sequentially in communication in an axial direction of the through hole, and orthographic projections of any two adjacent channel sections on a plane perpendicular to the axial direction of the through hole are mutually staggered. The present solution solves the problem of accidental sparking being likely to occur in an existing reaction chamber.

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Inventors:
XU GANG (CN)
Application Number:
PCT/CN2021/075520
Publication Date:
September 10, 2021
Filing Date:
February 05, 2021
Export Citation:
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Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
C30B25/08; C30B25/14; C30B29/40; C30B29/48
Foreign References:
CN111321463A2020-06-23
CN109487238A2019-03-19
CN201924077U2011-08-10
CN205388967U2016-07-20
CN108538694A2018-09-14
CN105103269A2015-11-25
CN106337169A2017-01-18
CN108573891A2018-09-25
CN101345184A2009-01-14
CN107180782A2017-09-19
CN101339895A2009-01-07
CN103966574A2014-08-06
JP2013174023A2013-09-05
KR20070002218A2007-01-05
Other References:
See also references of EP 4116467A4
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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