A RECIPE-AND-COMPONENT CONTROL MODULE AND METHODS THEREOF

Title:

A RECIPE-AND-COMPONENT CONTROL MODULE AND METHODS THEREOF

Document Type and Number:

WIPO Patent Application WO2008121657

Kind Code:

B1

Abstract:

A recipe-and-component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.

Inventors:

HUANG CHUNG-HO (US)
LUI ANDREW (US)

Application Number:

PCT/US2008/058320

Publication Date:

November 27, 2008

Filing Date:

March 26, 2008

Export Citation:

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Assignee:

LAM RES CORP (US)
HUANG CHUNG-HO (US)
LUI ANDREW (US)

International Classes:

H01L21/3065

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