RESISTIVITY MEASURING SYSTEM

WIPO Patent Application WO/2023/074755

A1

This resistivity measuring system comprises: a voltage generating unit for generating a voltage having a periodic waveform between a protective electrode (23) and a board supporting body (31); a current-voltage converting unit for converting a current flowing to a probe electrode (21) into a voltage when a voltage is applied between the protective electrode (23) and the board supporting body (31) in a state in which a capacitive probe portion (20) has been brought into close proximity to a board (W) and a gap (G) has been formed between the capacitive probe portion (20) and the board (W); a Fourier transform unit for performing a Fourier transform of digital data obtained by converting an analog voltage output from the current-voltage converting unit; an amplitude/phase calculating unit for calculating an amplitude component and a phase component from a real number component and an imaginary number component obtained by the Fourier transform; and a resistivity calculating unit for calculating a resistivity on the basis of a frequency dependence of at least one of the real number component, the imaginary number component, the amplitude component, and the phase component.

YAMADA MASAYOSHI (JP)
FUKUZAWA MASAYUKI (JP)

PCT/JP2022/039988

May 04, 2023

October 26, 2022

Click for automatic bibliography generation  

NAT UNIV CORP KYOTO INST TECHNOLOGY (JP)

G01R27/02; H01L21/66

JPH0618460A	1994-01-25
US20040066204A1	2004-04-08
JPH1062464A	1998-03-06
US20110140721A1	2011-06-16
JPH08330374A	1996-12-13

OGITA YOH-ICHIRO, OYO BUTUR: "Contactless Measurements of Electrical Properties in Semiconductor", THE JAPAN SOCIETY OF APPLIED PHYSICS, vol. 49, no. 9, 10 September 1980 (1980-09-10), pages 930 - 935, XP093059947

KIMURA Mitsuru (JP)

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