Title:
SEMICONDUCTOR MANUFACTURING PROCESS DETECTION SYSTEM AND SEMICONDUCTOR MANUFACTURING PROCESS DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/028101
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application are a semiconductor manufacturing process detection system and a semiconductor manufacturing process detection method, the semiconductor manufacturing process detection system (100) comprising: a first acquisition module (101), used for acquiring a preset manufacturing process formulation, the preset manufacturing process formulation comprising preset manufacturing process formulation parameters; the first acquisition module (101) is also used for initiating a matching request to a matching module (102) and sending the preset manufacturing process formulation to the matching module (102); and a matching module (102), used for acquiring a production manufacturing process formulation on the basis of the matching request, the production manufacturing process formulation comprising a production manufacturing process formulation flow and production manufacturing process formulation parameters; the matching module (102) is also used for determining whether the production manufacturing process formulation flow is correct and determining whether the production manufacturing process formulation parameters satisfy the preset manufacturing process formulation parameters; the manufacturing process procedure and manufacturing process parameters in the production manufacturing process formulation are inspected simultaneously, thus ensuring by means of a more comprehensive inspection method that there is a higher yield of manufactured wafers.
Inventors:
LI HUANCHENG (CN)
CHEN YONGYU (CN)
CHEN YONGYU (CN)
Application Number:
PCT/CN2021/099428
Publication Date:
February 10, 2022
Filing Date:
June 10, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01L21/67; G06Q10/00
Foreign References:
| CN1744116A | 2006-03-08 | |||
| CN110135791A | 2019-08-16 | |||
| TW201510889A | 2015-03-16 | |||
| US7280885B1 | 2007-10-09 | |||
| US20040034648A1 | 2004-02-19 |
Attorney, Agent or Firm:
SHANGHAI CHENHAO INTELLECTUAL PROPERTY LAW FIRM GENERAL PARTNERSHIP (CN)
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