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Title:
SEMICONDUCTOR PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/109464
Kind Code:
A1
Abstract:
The present invention relates to the technical field of semiconductor devices. Provided is a semiconductor processing device. The semiconductor processing device comprises: a visual unit, which is arranged on a shell of the semiconductor processing device and is used for observing the internal conditions of the semiconductor processing device; a clearing unit, which is arranged in the semiconductor processing device and is used for clearing away a target object of the visual unit that is located on the inner side of the device; and a driving unit, which is connected to the clearing unit and is used for driving the clearing unit, so as to clear away the target object of the visual unit that is located on the inner side of the device. In the semiconductor processing device of the present invention, a clearing unit is provided for a visual unit in a matching manner, so as to collaborate with the visual unit in monitoring a semiconductor processing process, thereby facilitating precise control over the technological processing process and ensuring that a processing result of a semiconductor reaches the yield.

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Inventors:
WANG CHEN (CN)
YANG HONGCHAO (CN)
JIA ZHAOWEI (CN)
WANG JIAN (CN)
WANG HUI (CN)
Application Number:
PCT/CN2022/134110
Publication Date:
June 22, 2023
Filing Date:
November 24, 2022
Export Citation:
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Assignee:
ACM RES SHANGHAI INC (CN)
International Classes:
H01L21/67
Foreign References:
CN110303422A2019-10-08
CN208324508U2019-01-04
CN212725251U2021-03-16
CN211760527U2020-10-27
JP2007273806A2007-10-18
CN1963991A2007-05-16
CN207898432U2018-09-25
Attorney, Agent or Firm:
SHANGHAI PATENT & TRADEMARK LAW OFFICE, LLC (CN)
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