Title:
SENSOR DEVICE AND ELECTRONIC INSTRUMENT
Document Type and Number:
WIPO Patent Application WO/2019/159710
Kind Code:
A1
Abstract:
The present disclosure pertains to a sensor device and an electronic instrument configured so as to be able to have better spectroscopic characteristics. The sensor device comprises: a semiconductor substrate on which a photodiode is formed; a filter included in a multilayer structure laminated on the light reception side of the semiconductor substrate; and a moth-eye structure disposed on an uppermost surface, which is a layer above the filter. A surface plasmon resonance filter or a Fabry-Perot resonance filter is used as the filter. The present technique is applicable, for example, to a spectroscopic device that performs multispectroscopy or hyperspectrum spectroscopy.
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Inventors:
TODA ATSUSHI (JP)
PARK HYUNSUNG (JP)
PARK HYUNSUNG (JP)
Application Number:
PCT/JP2019/003553
Publication Date:
August 22, 2019
Filing Date:
February 01, 2019
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/146; G01J3/26; G01J3/51; G02B1/118; G02B5/28; H04N9/07
Foreign References:
| JP2008066702A | 2008-03-21 | |||
| JP2012059865A | 2012-03-22 | |||
| JP2013512445A | 2013-04-11 | |||
| JP2010272612A | 2010-12-02 | |||
| JP2013021168A | 2013-01-31 |
Attorney, Agent or Firm:
NISHIKAWA Takashi et al. (JP)
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