Title:
SUBSTRATE PROCESSING SYSTEM AND TUBING CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/136872
Kind Code:
A1
Abstract:
This substrate processing system comprises a cleaning unit, a plurality of processing-liquid supply units, and a substrate processing device. When cleaning tubing, the cleaning unit supplies a first cleaning liquid to processing units in the processing-liquid supply units. The processing-liquid supply units accumulate the first cleaning liquid supplied by the cleaning unit inside processing-liquid tanks and then supply the first cleaning liquid from said processing-liquid tanks to processing units in the substrate processing device via the aforementioned tubing. The cleaning unit prepares a second cleaning liquid in parallel with the cleaning of the tubing via the first cleaning liquid and then supplies the prepared second cleaning liquid to the processing-liquid tanks.
Inventors:
HIGUCHI AYUMI (JP)
FUJITA ERI (JP)
YOSHIDA HIROSHI (JP)
NOMURA MASASHI (JP)
FUJITA ERI (JP)
YOSHIDA HIROSHI (JP)
NOMURA MASASHI (JP)
Application Number:
PCT/JP2015/001010
Publication Date:
September 17, 2015
Filing Date:
February 26, 2015
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
B08B3/04; H01L21/304; B08B9/032
Foreign References:
| JP2004267965A | 2004-09-30 | |||
| JP2012200712A | 2012-10-22 |
Attorney, Agent or Firm:
FUKUSHIMA, Yoshito (JP)
Yoshihito Fukushima (JP)
Yoshihito Fukushima (JP)
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