Title:
SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE TRANSPORT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/122121
Kind Code:
A1
Abstract:
Provided are a substrate transport device and a substrate transport system that can achieve the same work efficiency as conventional devices and systems even with a small number of vacuum transport robots by way of improving the availability factor for each vacuum transport robot. This substrate transport device comprises a vacuum transport chamber, a vacuum transport robot that is provided inside the vacuum transport chamber, and a transfer unit that causes the vacuum transport robot to travel with respect to the vacuum transport chamber, and the vacuum transport robot has a robot base that is supported by the transfer unit. The substrate transport device further comprises at least two substrate load tables that are provided above the robot base and on which substrates are placed temporarily.
Inventors:
HIRAKIDA JYUNICHI (JP)
Application Number:
PCT/JP2019/048494
Publication Date:
June 18, 2020
Filing Date:
December 11, 2019
Export Citation:
Assignee:
HIRATA SPINNING (JP)
International Classes:
B25J5/02; H01L21/677
Domestic Patent References:
| WO2001075965A1 | 2001-10-11 |
Foreign References:
| JP2012216614A | 2012-11-08 | |||
| JP2004265947A | 2004-09-24 | |||
| JP2010147207A | 2010-07-01 | |||
| JP2007251090A | 2007-09-27 |
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
Download PDF:
Previous Patent: MEDICAL DEVICE, APPLICATOR, AND CLIP UNIT
Next Patent: THERMOPLASTIC RESIN FOR LENSES, AND LENS COMPRISING SAME
Next Patent: THERMOPLASTIC RESIN FOR LENSES, AND LENS COMPRISING SAME