Title:
SURFACE ROUGHNESS/OUTLINE SHAPE MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/023605
Kind Code:
A1
Abstract:
A surface roughness/outline shape measurement device (1) has a stylus orientation
changing section (9) and a balance member (63). In the surface roughness/outline
shape measurement device (1), a pivot support section (62, 64, 71a, 71b) supports
a cantilever (7) so that it can pivot about a pivot axis that is in the direction
normal to the longitudinal direction of the cantilever (7), and the stylus orientation
changing section (9) rotates the pivot support section (62, 64, 71a, 71b) about
a rotation axis that is in the longitudinal direction of the cantilever (7), changing
the orientation of a stylus (11) provided at the forward end of the cantilever
(7). The balance member (63) causes the cantilever (7) supported at the pivot
axis to balance in weight in order to eliminate influence of gravity acting on
the cantilever (7) that rotates as the pivot support section (62, 64, 71a, 71b)
rotates.
Inventors:
ISHII MASAFUMI (JP)
Application Number:
PCT/JP2006/311150
Publication Date:
March 01, 2007
Filing Date:
May 29, 2006
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
ISHII MASAFUMI (JP)
ISHII MASAFUMI (JP)
International Classes:
G01B5/28
Foreign References:
| JP2001133248A | 2001-05-18 | |||
| JPH11248404A | 1999-09-17 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (Toranomon 37 Mori Bldg. 5-1, Toranomon 3-chom, Minato-ku Tokyo 23, JP)
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