Title:
SURFACE TREATMENT METHOD FOR QUARTZ COMPONENT
Document Type and Number:
WIPO Patent Application WO/2022/041897
Kind Code:
A1
Abstract:
Disclosed is a surface treatment method for a quartz component. The method comprises: carrying out sand blasting on the quartz component; carrying out an ultrasonic oscillation treatment on the sand-blasted quartz component to remove sharp corners which are formed on the surface of the quartz component; immersing and washing the quartz component; and drying the immersed and washed quartz component. The surface treatment method for the quartz component can increase the surface roughness of the quartz component and enhance the adhesive force of the quartz component, and can also remove the sharp corners which are formed after sand blasting of the quartz component, such that a linear film is prevented from being formed on the surface of the quartz component during the manufacturing process, and the yield of wafers is improved.
Inventors:
YUAN JIAZHOU (CN)
Application Number:
PCT/CN2021/096923
Publication Date:
March 03, 2022
Filing Date:
May 28, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
C03C15/00; H01L21/205
Foreign References:
| CN1522457A | 2004-08-18 | |||
| CN1448996A | 2003-10-15 | |||
| CN101367618A | 2009-02-18 | |||
| JPH1059744A | 1998-03-03 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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