Title:
TECHNIQUES TO ENHANCE SELECTIVITY OF ELECTRICAL BREAKDOWN OF CARBON NANOTUBES
Document Type and Number:
WIPO Patent Application WO/2010/144856
Kind Code:
A3
Abstract:
Techniques are used to fabricate carbon nanotube devices. These techniques improve the selective removal of undesirable nanotubes such as metallic carbon nanotubes while leaving desirable nanotubes such as semiconducting carbon nanotubes. In a first technique, slot patterning is used to slice or break carbon nanotubes have a greater length than desired. By altering the width and spacing of the slotting, nanotubes have a certain length or greater can be removed. Once the lengths of nanotubes are confined to a certain or expected range, the electrical breakdown approach of removing nanotubes is more effective. In a second technique, a Schottky barrier is created at one electrode (e.g., drain or source). This Schottky barrier helps prevent the inadvertent removal the desirable nanotubes when using the electrical breakdown approach. The first and second techniques can be used individually or in combination with each other.
Inventors:
WONG ERIC W (US)
HUNT BRIAN D (US)
KUMAR RAJAY (US)
LI CHAO (US)
HUNT BRIAN D (US)
KUMAR RAJAY (US)
LI CHAO (US)
Application Number:
PCT/US2010/038396
Publication Date:
March 03, 2011
Filing Date:
June 11, 2010
Export Citation:
Assignee:
ETAMOTA CORP (US)
WONG ERIC W (US)
HUNT BRIAN D (US)
KUMAR RAJAY (US)
LI CHAO (US)
WONG ERIC W (US)
HUNT BRIAN D (US)
KUMAR RAJAY (US)
LI CHAO (US)
International Classes:
H01L21/336; H01L29/78
Foreign References:
| US20040023514A1 | 2004-02-05 | |||
| US20040192072A1 | 2004-09-30 | |||
| US20060158760A1 | 2006-07-20 |
Attorney, Agent or Firm:
CHAN, Melvin, D. et al. (900 Lafayette StreetSanta Clara, CA, US)
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