Title:
TEMPERATURE CONTROL DEVICE, PROCESSING DEVICE, AND TEMPERATURE CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2013/073482
Kind Code:
A1
Abstract:
A temperature control device (70) comprises the following: a heat exchanger (71) which exchanges heat with the surrounding area using the phase change of a refrigerant; a rotary pump (73) which introduces the refrigerant from the heat exchanger (71) and which fuses the refrigerant to oil inside of the rotary pump; an oil water separator (74) which introduces from the rotary pump (73) the refrigerant that has been fused to the oil and which separates the refrigerant from the oil. The temperature control device has a refrigeration cycle having a cooling function whereby the refrigerant that has been separated from the oil is caused to once again circulate to the heat exchanger (71).
Inventors:
SASAKI YASUHARU (JP)
MATSUZAKI KAZUYOSHI (JP)
MATSUZAKI KAZUYOSHI (JP)
Application Number:
PCT/JP2012/079175
Publication Date:
May 23, 2013
Filing Date:
November 09, 2012
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/3065; F04C29/00; F25B1/00
Domestic Patent References:
| WO2004025199A1 | 2004-03-25 |
Foreign References:
| JP2008157583A | 2008-07-10 | |||
| JPH0336472A | 1991-02-18 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Tadashige Ito (JP)
Tadashige Ito (JP)
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Claims:
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