Title:
TESTING APPARATUS AND METHOD CAPABLE OF PERFORMING SIMULTANEOUS EQUAL-OPTICAL-DISTANCE IMAGING ON FOUR SIDES OF SEMICONDUCTOR PELLET
Document Type and Number:
WIPO Patent Application WO/2023/197632
Kind Code:
A1
Abstract:
A testing apparatus and method capable of performing simultaneous equal-optical-distance imaging on four sides of a semiconductor pellet. The testing apparatus is sequentially provided, in the direction of an optical path, with a camera (1), a telecentric imaging lens (2), a four-sided image-combination composite prism assembly (3), four identical image-deflection prism assemblies (K) arranged around the four-sided image-combination composite prism assembly (3) in a rectangular array, a semiconductor pellet (6), and a glass rotary object-bearing stage (7), wherein the four-sided image-combination composite prism assembly (3) is located on an optical axis (A) of the telecentric imaging lens (2).
Inventors:
LIAO TINGDI (CN)
LIN XIAODAN (CN)
GAO WANPENG (CN)
ZHENG HENG (CN)
YANG CHENQI (CN)
YAN SHAOBIN (CN)
LIN XIAODAN (CN)
GAO WANPENG (CN)
ZHENG HENG (CN)
YANG CHENQI (CN)
YAN SHAOBIN (CN)
Application Number:
PCT/CN2022/137094
Publication Date:
October 19, 2023
Filing Date:
December 07, 2022
Export Citation:
Assignee:
UNIV QUANZHOU NORMAL (CN)
International Classes:
G01N21/88; B07C5/342
Foreign References:
| CN114951037A | 2022-08-30 | |||
| CN111044524A | 2020-04-21 | |||
| CN111157535A | 2020-05-15 | |||
| CN109100366A | 2018-12-28 | |||
| US20070279622A1 | 2007-12-06 |
Attorney, Agent or Firm:
FUZHOU YUANCHUANG PATENT AND TRADEMARK AGENT LTD. (CN)
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