Title:
THIN-FILM SOLAR CELL MANUFACTURING METHOD AND THIN-FILM SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2016/074368
Kind Code:
A1
Abstract:
A thin-film solar cell manufacturing method and a thin-film solar cell. The method comprises: forming a first electrode (102) on a substrate (101); forming an N-type doped layer (103) and an intrinsic semiconductor thin film (104) on the first electrode (102); conducting ion implantation on the intrinsic semiconductor thin film (104), and conducting activation treatment on the intrinsic semiconductor thin film (104) after ion implantation by using an excimer laser annealing (ELA) process, so as to form a P-type doped layer (1042) on the upper layer of the intrinsic semiconductor thin film (104); and forming a second electrode (105) on the P-type doped layer (1042).
Inventors:
REN QINGRONG (CN)
WANG LU (CN)
GUO WEI (CN)
WANG LU (CN)
GUO WEI (CN)
Application Number:
PCT/CN2015/073107
Publication Date:
May 19, 2016
Filing Date:
February 15, 2015
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
H01L31/18; H01L31/0368
Foreign References:
| US20090178711A1 | 2009-07-16 | |||
| US6180871B1 | 2001-01-30 | |||
| CN103178149A | 2013-06-26 | |||
| CN1862840A | 2006-11-15 |
Other References:
See also references of EP 3226310A4
None
None
Attorney, Agent or Firm:
DRAGON INTELLECTUAL PROPERTY LAW FIRM (CN)
北京银龙知识产权代理有限公司 (CN)
北京银龙知识产权代理有限公司 (CN)
Download PDF:
Previous Patent: METHOD AND DEVICE FOR DELETING GR FUNCTION
Next Patent: TOUCH DISPLAY MODULE AND ELECTRONIC DISPLAY PRODUCT
Next Patent: TOUCH DISPLAY MODULE AND ELECTRONIC DISPLAY PRODUCT