Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
TRANSFER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/082341
Kind Code:
A1
Abstract:
A mark which can specify the center of a center pin is formed on the center pin which supports a transfer substrate.

Inventors:
KASONO OSAMU (JP)
HASHIMOTO KAZUNOBU (JP)
FUJINAWA TADASHI (JP)
KOJIMA YOSHIAKI (JP)
Application Number:
PCT/JP2009/050573
Publication Date:
July 22, 2010
Filing Date:
January 16, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
PIONEER CORP (JP)
KASONO OSAMU (JP)
HASHIMOTO KAZUNOBU (JP)
FUJINAWA TADASHI (JP)
KOJIMA YOSHIAKI (JP)
International Classes:
G11B5/84
Foreign References:
JP2005529436A2005-09-29
JP2005252237A2005-09-15
JP2005178384A2005-07-07
JP2005158087A2005-06-16
JP2007190734A2007-08-02
JP2006040321A2006-02-09
Attorney, Agent or Firm:
FUJIMURA, Motohiko (JP)
Toson Motohiko (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: BASE MATERIAL ETCHING MECHANISM, VACUUM PROCESS DEVICE AND BASE MATERIAL ETCHING METHOD

Next Patent: SEMICONDUCTOR DEVICE, PROCESS FOR FABRICATING SEMICONDUCTOR DEVICE, APPARATUS FOR FABRICATING SEMICO...