Title:
TRANSPARENT CONDUCTIVE FILM FOR FLAT PANEL DISPLAYS
Document Type and Number:
WIPO Patent Application WO2004042108
Kind Code:
A3
Abstract:
Transparent conductive films for flat panel displays and methods for producing them are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film, the multi-layered conductive metallic film comprising two layers of an alloy selected from the group consisting of indium cerium oxide (InCeO) and indium tin oxide (ITO) surrounding a layer of an alloy of silver, palladium, and copper (Ag/Pd/Cu); and (3) collecting the composite film in continuous rolls. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising a multilayered film as described above formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 80% throughout the visible region; an electrical resistance of no greater than about 10 ohm/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the multi-layered metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
Inventors:
SASAKI YUKIHIKO
HE XIAO-MING
HE XIAO-MING
Application Number:
PCT/US2003/034642
Publication Date:
December 09, 2004
Filing Date:
October 31, 2003
Export Citation:
Assignee:
AVERY DENNISON CORP (US)
International Classes:
C23C14/02; C23C14/08; C23C14/20; C23C28/00; G02F1/1343; G02F1/1333; H01L51/52; (IPC1-7): C23C14/08; C23C14/18; C23C14/35; G02F1/1343; H01L51/20; H01L51/40
Domestic Patent References:
| WO2000026973A1 | 2000-05-11 |
Foreign References:
| US20020163614A1 | 2002-11-07 | |||
| US20020086164A1 | 2002-07-04 | |||
| EP1043606A1 | 2000-10-11 | |||
| US20020110673A1 | 2002-08-15 | |||
| US6125226A | 2000-09-26 | |||
| US5703436A | 1997-12-30 |
Other References:
KIM J.-Y. , SOHN D., KIM E.-R.: "Polymer-based multi-layer conductive electrode film for plastic LCD applications", APPL. PHYS. A, APPLIED PHYSICS A (MATERIALS SCIENCE PROCESSING), JUNE 2001, SPRINGER-VERLAG, GERMANY, vol. 72, no. 6, 26 April 2001 (2001-04-26), HEIDELBERG, pages 699 - 704, XP002292571, ISSN: 0947-8396
KLOPPEL A ET AL: "Influence of substrate temperature and sputtering atmosphere on electrical and optical properties of double silver layer systems", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 392, no. 2, 30 July 2001 (2001-07-30), pages 311 - 314, XP004250758, ISSN: 0040-6090
KLOPPEL A ET AL: "Influence of substrate temperature and sputtering atmosphere on electrical and optical properties of double silver layer systems", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 392, no. 2, 30 July 2001 (2001-07-30), pages 311 - 314, XP004250758, ISSN: 0040-6090
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