Title:
ULTRAVIOLET IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/038872
Kind Code:
A1
Abstract:
The present invention improves starting performance in an excimer-lamp-equipped ultraviolet irradiation device. This ultraviolet irradiation device is equipped with a plurality of excimer lamps each having a luminous tube in which gas for discharge containing a rare gas is sealed. The plurality of excimer lamps include a first excimer lamp in which the gas for discharge is sealed at a first sealed gas pressure, and a second excimer lamp in which the gas for discharge is sealed at a second sealed gas pressure lower than the first sealed gas pressure. The first excimer lamp is disposed at a position at which at least part of light emitted from the second excimer lamp can be incident.
Inventors:
YAGYU HIDEAKI (JP)
Application Number:
PCT/JP2021/022286
Publication Date:
February 24, 2022
Filing Date:
June 11, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J61/16; H01J65/00
Foreign References:
| JP2020092968A | 2020-06-18 | |||
| JP2013171660A | 2013-09-02 | |||
| JP2018055965A | 2018-04-05 | |||
| JP2017004702A | 2017-01-05 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
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