Title:
VACUUM ARC SOURCE COMPRISING A DEVICE FOR GENERATING A MAGNETIC FIELD
Document Type and Number:
WIPO Patent Application WO2004057642
Kind Code:
A3
Abstract:
The invention relates to a vacuum arc source and to a method for operating the same, said source comprising a target with a surface for operating an arc discharge. The target is arranged in the range of influence of a device for generating a magnetic field, said device comprising at least two magnetic systems of opposite polarity and being embodied in such a way that the component B⊥ which is perpendicular to the surface and pertains to the resulting magnetic field has essentially constantly low values over a large part of the surface or has a value equal to zero.
Inventors:
SCHUETZE ANDREAS (AT)
WOHLRAB CHRISTIAN (AT)
WOHLRAB CHRISTIAN (AT)
Application Number:
PCT/CH2003/000710
Publication Date:
December 09, 2004
Filing Date:
October 30, 2003
Export Citation:
Assignee:
UNAXIS BALZERS AG (LI)
SCHUETZE ANDREAS (AT)
WOHLRAB CHRISTIAN (AT)
SCHUETZE ANDREAS (AT)
WOHLRAB CHRISTIAN (AT)
International Classes:
H01J37/32; (IPC1-7): H01J37/32; C23C14/32
Domestic Patent References:
| WO2002077318A1 | 2002-10-03 |
Foreign References:
| US5298136A | 1994-03-29 |
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