Title:
VAPORIZING APPARATUS USING INDUCTION HEATING AND VACUUM DEPOSITION SYSTEM HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2014/193026
Kind Code:
A1
Abstract:
The present invention relates to a vaporizing apparatus using induction heating and a vacuum deposition system having the same. The vaporizing apparatus using induction heating and a vacuum deposition system having the same according to the present invention comprise: a fluid supplying part for supplying a fluid in a liquid phase; a vaporization generating part for receiving the fluid in a liquid phase therein from the fluid supplying part and vaporizing the fluid in a liquid phase by heating the fluid in a liquid phase in contact with the wall surface thereof; and an induction heating part for generating an induction current in the vaporization generating part by change in a magnetic field, thereby adjusting the temperature of the vaporization generating part to above the vaporization temperature of the fluid in a liquid phase.
Inventors:
MUN JEONG-IL (KR)
LEE MYUNGSUN (KR)
KIM JUNGHWAN (KR)
LEE KWANG HYUNG (KR)
LEE MYUNGSUN (KR)
KIM JUNGHWAN (KR)
LEE KWANG HYUNG (KR)
Application Number:
PCT/KR2013/005655
Publication Date:
December 04, 2014
Filing Date:
June 26, 2013
Export Citation:
Assignee:
SNU PRECISION CO LTD (KR)
International Classes:
C23C16/452; C23C14/24; C23C16/44
Foreign References:
| KR20130054703A | 2013-05-27 | |||
| KR20110038343A | 2011-04-14 | |||
| KR20120100398A | 2012-09-12 | |||
| JP2003100427A | 2003-04-04 | |||
| KR20060028181A | 2006-03-29 |
Attorney, Agent or Firm:
CHO, YOUNG HYUN (KR)
์กฐ์ํ (KR)
์กฐ์ํ (KR)
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