VIBRATORY GYRO ELEMENT AND ANGULAR VELOCITY SENSOR COMPRISING SAME

Title:

VIBRATORY GYRO ELEMENT AND ANGULAR VELOCITY SENSOR COMPRISING SAME

Document Type and Number:

WIPO Patent Application WO/2022/004562

Kind Code:

A1

Abstract:

A vibratory gyro element 100 comprises a fixed part 10, an oscillator 20 having a vibration mode of cos Nθ (N is a natural number of 2 or more), a support part 30, and an electrode 40. The electrode 40 is disposed in each of 4N orientations arranged in the outer circumferential direction of the oscillator 20. The plurality of electrodes 40 include a primary driving electrode PD, a primary pickoff electrode PPO, a secondary pickoff electrode SPO, and a secondary driving electrode SD. The primary pickoff electrode PPO is disposed in the same orientation as the primary driving electrode PD, and the secondary driving electrode SD is disposed in the same orientation as the secondary pickoff electrode SPO.

Inventors:

UCHINO RYOHEI (JP)
MORIGUCHI TAKAFUMI (JP)
OKIMOTO NAOKI (JP)

Application Number:

PCT/JP2021/024032

Publication Date:

January 06, 2022

Filing Date:

June 24, 2021

Export Citation:

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Assignee:

SUMITOMO PRECISION PROD CO (JP)

International Classes:

B81B3/00; G01C19/5684; H01L41/047; H01L41/09; H01L41/113

Foreign References:

JP2011027561A	2011-02-10
JP2009115559A	2009-05-28
JP2011027560A	2011-02-10
JP5410518B2	2014-02-05
JP2019032302A	2019-02-28
JP2009115559A	2009-05-28

Other References: