Title:
WIPING PAD, NOZZLE MAINTENANCE DEVICE USING PAD, AND COATING PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/118550
Kind Code:
A1
Abstract:
A wiping pad (49) wipes process liquid adhering to the outlet of a slit nozzle and the side surface of the nozzle. The wiping pad includes: a scraping edge (49d1) which intersects with the longitudinal direction of said outlet and is disposed contactably to the outlet and the nozzle side surface; and a discharge passage (49a) which is provided before the scraping edge (49d1) in the movement direction along the longitudinal direction of the nozzle to discharge the process liquid scraped by the scraping edge (49d1). The discharge passage (49a) is a V-shaped groove which is formed on the upper surface (49g) of the pad along the movement direction The scraping edge (49d1) is formed at the rear end edge of the V-shaped groove, and the V-shaped groove is formed such that the width and depth of the groove gradually increases forwardly from the scraping edge (49d1).
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Inventors:
INAMASU TOSHIFUMI (JP)
OGASAWARA YUKIO (JP)
TASHIRO KEI (JP)
OGASAWARA YUKIO (JP)
TASHIRO KEI (JP)
Application Number:
PCT/JP2013/050743
Publication Date:
August 15, 2013
Filing Date:
January 17, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/027; B05C5/02; B05C11/10
Foreign References:
| JP2008268906A | 2008-11-06 | |||
| JP2006167508A | 2006-06-29 | |||
| JP2005270841A | 2005-10-06 | |||
| JP2011167607A | 2011-09-01 | |||
| JPH11300261A | 1999-11-02 | |||
| JP2008136897A | 2008-06-19 | |||
| JP2005087777A | 2005-04-07 | |||
| JP2007237122A | 2007-09-20 | |||
| JP2008149247A | 2008-07-03 | |||
| JP2005262127A | 2005-09-29 | |||
| JP2008290031A | 2008-12-04 | |||
| JP2012185404A | 2012-09-27 | |||
| JP2012232269A | 2012-11-29 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
Tetsuo Kanamoto (JP)
Tetsuo Kanamoto (JP)
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Claims: