Title:
X-RAY MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2017/051890
Kind Code:
A1
Abstract:
In order to provide an X-ray microscope of a size that can be brought into a room, by shortening the path length of the X-ray microscope, an X-ray microscope fabricated according to the present invention includes, in order along an optical axis, at least one each of an X-ray source 1, a specimen holding unit 3, a concave Kirkpatrick-Baez (KB) mirror 4, a convex KB mirror 5 and a light receiving unit 8 in a position having an image-forming relationship with the position of the specimen holding unit 3.
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Inventors:
MATSUYAMA SATOSHI (JP)
YAMADA JUMPEI (JP)
YAMADA JUMPEI (JP)
Application Number:
PCT/JP2016/078070
Publication Date:
March 30, 2017
Filing Date:
September 23, 2016
Export Citation:
Assignee:
UNIV OSAKA (JP)
International Classes:
G21K7/00; G21K1/06
Foreign References:
| JP2014013169A | 2014-01-23 | |||
| JP2013221874A | 2013-10-28 | |||
| JPH09145899A | 1997-06-06 |
Other References:
SATOSHI MATSUYAMA ET AL.: "Advanced Kirkpatrick-Baez Mirror Kogakukei o Mochiita Ko Bunkaino Katsu Iroshusa no Nai Ko X-sen Kenbikyo no Kaihatsu", 2014 NENDO THE JAPAN SOCIETY FOR PRECISION ENGINEERING SHUNKI TAIKAI GAKUJUTSU KOENKAI KOEN RONBUNSHU, 1 March 2014 (2014-03-01), pages 1285 - 1286, XP009510063, DOI: 10.11522/pscjspe.2014S.0_1285
KOMEI NAGAI ET AL.: "Imaging Optics for Extreme Ultraviolet Rays", JAPANESE JOURNAL OF OPTICS, vol. 28, no. 12, 2 August 1999 (1999-08-02), pages 16 - 21, XP009509113
JTEC CORP.: "Heisei 22 Nendo Senryakuteki Kiban Gijutsu Kodoka Shien Jigyo 'Hoshako-yo Mirror ni Kansuru Kako Gijutsu no Koseidoka", KANSAI BUREAU OF ECONOMY, TRADE AND INDUSTRY KENKYU KAIHATSU SEIKA HOKOKUSHO, 30 September 2011 (2011-09-30), XP009510065
See also references of EP 3355315A4
KOMEI NAGAI ET AL.: "Imaging Optics for Extreme Ultraviolet Rays", JAPANESE JOURNAL OF OPTICS, vol. 28, no. 12, 2 August 1999 (1999-08-02), pages 16 - 21, XP009509113
JTEC CORP.: "Heisei 22 Nendo Senryakuteki Kiban Gijutsu Kodoka Shien Jigyo 'Hoshako-yo Mirror ni Kansuru Kako Gijutsu no Koseidoka", KANSAI BUREAU OF ECONOMY, TRADE AND INDUSTRY KENKYU KAIHATSU SEIKA HOKOKUSHO, 30 September 2011 (2011-09-30), XP009510065
See also references of EP 3355315A4
Attorney, Agent or Firm:
UEKI, Kyuichi et al. (JP)
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