Title:
XY TABLE ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2007/066501
Kind Code:
A1
Abstract:
An XY table actuator that can be significantly reduced in size and enables a reduction
in the height of a table, and this can be achieved despite the fact that the XY table
actuator incorporates drive means for freely moving an object placed on the table
in an XY plane and positioning it. The actuator has a stationary plate (2) having
a receiving groove in the X-direction; a moving plate (5) having a receiving groove
in the Y-direction; an intermediate plate (4) whose lower body is assembled via
rolling bodies (3) into the receiving groove (20) of the stationary plate (2),
whose upper body is assembled via the rolling bodies (3) into the receiving rove
of the moving plate (5), and which is movable in the X-direction relative to the
stationary plate and in the Y-direction relative to the moving plate; X drive
means (6) for advancing the intermediate plate in the X-direction, relative
to the stationary plate; and Y drive means (7) for advancing the intermediate
plate in the Y-direction, relative to the moving plate. In the intermediate plate
are provided receiving chambers (40, 41) for the X drive means and the Y drive means.
Inventors:
ASO TOSHIYUKI
KIMURA YOSHIHIRO
KIMURA YOSHIHIRO
Application Number:
PCT/JP2006/323116
Publication Date:
June 14, 2007
Filing Date:
November 20, 2006
Export Citation:
Assignee:
THK CO LTD (JP)
ASO TOSHIYUKI
KIMURA YOSHIHIRO
ASO TOSHIYUKI
KIMURA YOSHIHIRO
International Classes:
G12B5/00; F16C29/04; F16C41/00
Foreign References:
| JPH01106136U | 1989-07-17 | |||
| JPS5924226U | 1984-02-15 | |||
| JPH09184517A | 1997-07-15 |
Attorney, Agent or Firm:
IDE, Tetsuroh (Ohtamachi 6-chome Naka-k, Yokohama-shi Kanagawa 11, JP)
Download PDF: