Y2O3 SINTERED BODY, CORROSION RESISTANT MEMBER AND METHOD FOR PRODUCING SAME, AND MEMBER FOR SEMICONDUCTOR/LIQUID CRYSTAL PRODUCING APPARATUS

Title:

Y2O3 SINTERED BODY, CORROSION RESISTANT MEMBER AND METHOD FOR PRODUCING SAME, AND MEMBER FOR SEMICONDUCTOR/LIQUID CRYSTAL PRODUCING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2005/009919

Kind Code:

A1

Abstract:

Disclosed is a corrosion resistant member which is composed of a Y₂O₃ sintered body containing not less than 99.9 mass% of Y in terms of Y₂O₃. In the Y₂O₃ sintered body, the difference between the average crystal particle diameter of the surface portion and that of the deep portion is not more than 30 μm.

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Inventors:

HAMADA TOSHIYUKI (JP)

Application Number:

PCT/JP2004/009621

Publication Date:

February 03, 2005

Filing Date:

June 30, 2004

Export Citation:

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Assignee:

KYOCERA CORP (JP)
HAMADA TOSHIYUKI (JP)

International Classes:

C04B35/505; C04B35/638; C04B35/64; (IPC1-7): C04B35/505

Foreign References:

JP2001181042A	2001-07-03
JP2003086475A	2003-03-20
JP2002362966A	2002-12-18

Attorney, Agent or Firm:

Kawamiya, Osamu (IMP Building 3-7 Shiromi 1-chome, Chuo-k, Osaka-shi Osaka 01, JP)

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