Title:
ZN-BASED ORGANIC COORDINATION NANOPARTICLE AND PREPARATION METHOD THEREFOR, PHOTORESIST COMPOSITION CONTAINING SAME, AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2024/046108
Kind Code:
A1
Abstract:
A Zn-based organic coordination nanoparticle and a preparation method therefor, a photoresist composition containing same, and a use thereof. The Zn-based organic coordination nanoparticle is obtained by mixing and stirring a zinc-containing compound, preferably zinc acetate, a benzoic acid, and a nitrogen-containing organic ligand in an organic solvent, and then performing post-treatment, and in addition, a nanoparticle having a chemical general formula of [ZnmXn(CH3COO)tYpHq]r is obtained, wherein X is benzoate, CH3COO represents acetate, Y is a nitrogen-containing organic ligand, r is a degree of polymerization, m, n, p, q and r are each independently selected from any integer of 1-20, and t is any integer selected from 0-20. As a photoresist component, the Zn-based organic coordination nanoparticle can achieve more excellent photolithography performance such as high resolution, high sensitivity, and low line roughness.
Inventors:
XU HONG (CN)
HE XIANGMING (CN)
TAO PEIPEI (CN)
HE XIANGMING (CN)
TAO PEIPEI (CN)
Application Number:
PCT/CN2023/112965
Publication Date:
March 07, 2024
Filing Date:
August 14, 2023
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
BEIJING VFORTUNE NEW ENERGY POWER TECH DEVELOPMENT CO LTD (CN)
BEIJING VFORTUNE NEW ENERGY POWER TECH DEVELOPMENT CO LTD (CN)
International Classes:
C07F3/06; G03F7/00; G03F7/004
Foreign References:
| CN114675488A | 2022-06-28 | |||
| US20210157233A1 | 2021-05-27 | |||
| US20210311388A1 | 2021-10-07 | |||
| CN112543890A | 2021-03-23 |
Attorney, Agent or Firm:
INTEBRIGHT LLP (CN)
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