Title:
処理状態モニタリングと終了点検出とのための、傾斜から閾値へ変換する方法および装置
Document Type and Number:
Japanese Patent JP2006510228
Kind Code:
A
Abstract:
A method for converting a slope based detection task to a threshold based detection task is provided. The method initiates with defining an approximation equation for a set of points corresponding to values of a process being monitored. Then, an expected value at a current point of the process being monitored is predicted. Next, a difference between a measured value at the current point of the process being monitored and the corresponding expected value is calculated. Then, the difference is monitored for successive points to detect a deviation value between the measured value and the expected value. Next, a transition point for the process being monitored is identified based on the detection of the deviation value. A processing system configured to provide real time data for a slope based transition and a computer readable media are also provided.
Inventors:
Gottkiss, Arch
Katz, Brady Mill
Hemker, david
Kistler, Rodney
Bright, Nicholas Jay.
Katz, Brady Mill
Hemker, david
Kistler, Rodney
Bright, Nicholas Jay.
Application Number:
JP2004565459A
Publication Date:
March 23, 2006
Filing Date:
December 11, 2003
Export Citation:
Assignee:
LAM RESEARCH CORPORATION
International Classes:
H01L21/02; G05B23/02; H01L21/66
Domestic Patent References:
| JPS56114329A | 1981-09-08 | |||
| JPH06318572A | 1994-11-15 | |||
| JPH08148475A | 1996-06-07 | |||
| JPH0428224A | 1992-01-30 |
Foreign References:
| WO1999040617A1 | 1999-08-12 |
Attorney, Agent or Firm:
Meisei International Patent Office