Title:
薄膜蒸着エバポレーター
Document Type and Number:
Japanese Patent JP2007500794
Kind Code:
A
Abstract:
A material source evaporator for use with an evacuable interior deposition chamber in which evaporated materials are deposited on substrates comprising a container with an associated heater that can heat an vaporizable material provided in the container to provide a vapor thereof. A manifold having a plurality of output apertures also has an associated heater that can heat the material vapor provided in the manifold to remain sufficiently vaporous to pass out of output apertures which are in a selected pattern to provide a calibrated spatial distribution of material vapor that results in a deposition thereof in a layer on an adjacent substrate in a fixed position. Thus, the layer has a relatively uniform thickness.
More Like This:
Inventors:
Chow, Peter Pee.
Klein, Don Gee.
Hartman, Ralph M.
Masahiko Shibata
Klein, Don Gee.
Hartman, Ralph M.
Masahiko Shibata
Application Number:
JP2006533178A
Publication Date:
January 18, 2007
Filing Date:
May 17, 2004
Export Citation:
Assignee:
Svity Associates, Inc.
International Classes:
C23C14/24; C23C14/54; H01L51/40
Domestic Patent References:
| JP2002184571A | 2002-06-28 | |||
| JPS63235466A | 1988-09-30 | |||
| JPH01225769A | 1989-09-08 | |||
| JP2002030418A | 2002-01-31 |
Foreign References:
| WO2001061071A2 | 2001-08-23 | |||
| US5336324A | 1994-08-09 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita