Title:
イオンビームの中を通過してワークピースを往復移動させるための方法
Document Type and Number:
Japanese Patent JP2007532009
Kind Code:
A
Abstract:
A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is operable to reciprocally translate the workpiece with respect to a stationary reference. A shaft rotatably driven by the rotor extends along the first axis, and a scan arm is operably coupled to the shaft, wherein the scan arm is operable to support the workpiece thereon. Cyclical counter rotations of the shaft by the motor are operable to rotate the scan arm, therein scanning the workpiece through the ion beam along a first scan path, wherein the stator acts as a reaction mass to the rotation of the rotor. A controller is further operable to control an electromagnetic force between the rotor and the stator, therein generally determining a rotational position of the rotor and the stator.
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Inventors:
John Pollack
Donald Berrian
John Vanderport
Donald Berrian
John Vanderport
Application Number:
JP2007507449A
Publication Date:
November 08, 2007
Filing Date:
April 05, 2005
Export Citation:
Assignee:
Axcelis Technologies, Inc.
International Classes:
H01L21/265; A61N5/00; B65H1/00; G21K5/04; H01J37/317; H01L21/00; H01L21/687
Domestic Patent References:
| JPH0374040A | 1991-03-28 | |||
| JP2003174760A | 2003-06-20 | |||
| JPH117915A | 1999-01-12 | |||
| JPH0973873A | 1997-03-18 | |||
| JPH07182999A | 1995-07-21 | |||
| JPH02261046A | 1990-10-23 |
Attorney, Agent or Firm:
Calyx
Miyazaki Yoshio
Mitsuo Tateishi
Kaoru Onozuka
Akio Tagami
High Masahiro
Toshio Nakamura
Tsutomu Kato
Yusuke Murakoshi
Miyazaki Yoshio
Mitsuo Tateishi
Kaoru Onozuka
Akio Tagami
High Masahiro
Toshio Nakamura
Tsutomu Kato
Yusuke Murakoshi
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