Title:
液体噴射ヘッド、液体噴射装置、圧電素子、超音波デバイス及びセンサー
Document Type and Number:
Japanese Patent JP2013098442
Kind Code:
A5
Application Number:
JP2011241708A
Publication Date:
December 11, 2014
Export Citation:
International Classes:
B41J2/055; H01L41/18; H01L41/39; H01L41/22; H01L41/187; H01L41/09; B41J2/045