Document Type and Number:
Japanese Patent JP2014138141
Kind Code:
A5
Application Number:
JP2013007115
Publication Date:
October 15, 2015
Filing Date:
January 18, 2013
Export Citation:
International Classes:
H01L21/8244; H01L27/11; H01L27/10; H01L29/786; H01L21/768
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