Title:
LIGHT IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2019107613
Kind Code:
A
Abstract:
To provide a light irradiation device which can remove electric charges from a processed body even if the processed body is electrified.SOLUTION: A light irradiation device for irradiating an ultraviolet ray to one face of a band-shaped processed body which is transported along a transport path comprises: a lamp house having an opening along a passage plane of the one-face side of the processed body in the transport path; an ultraviolet ray lamp arranged in the lamp house, and extending to a width direction of the processed body; gas supply means for supplying a processing-space gas containing an inactive gas in the lamp house; and a charge removal mechanism arranged in the vicinity of at least either of a carry-in port being the inside of the lamp house, or the outside of the lamp house into which the processed body in the lamp house is carried in, and a carry-out port from which the processed body is carried out, and removing electric charges from the processed body.SELECTED DRAWING: Figure 3
Inventors:
YAMAMORI KENJI
YOSHIHARA KEITA
YOSHIHARA KEITA
Application Number:
JP2017242310A
Publication Date:
July 04, 2019
Filing Date:
December 19, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
B08B7/00; B08B6/00; B08B11/00; H05F3/02
Domestic Patent References:
| JPH05297335A | 1993-11-12 | |||
| JP2011243913A | 2011-12-01 | |||
| JP2010267409A | 2010-11-25 |
Attorney, Agent or Firm:
Nobuo Fujimoto
Shigenobu Oshiro
Masuo Yamada
Shigenobu Keisuke
Masahiko Oi
Shigenobu Oshiro
Masuo Yamada
Shigenobu Keisuke
Masahiko Oi